Listed below are just a small selection of the parts we are able to offer for the PEP series tools.
If you do not see the particular part that you require, or if you require further information please contact us at gasonics.spares@eupt.co.uk
PEP Iridia
| Part Number | Description | |
| 22-2301 | Valve 4 way | |
| 93-3049 | Light Probe Seki | |
| 60-2025 | Magnetron | |
| 39-2018 | Lamp HG Ozone | |
| 61-2332 | Microwave Generator | |
| 94-3076 | Sapphire Tube | |
| 93-2696 | Atmosphere Switch | |
| 06-2568 | Quartz Centring Ring | |
| 95-3532 | Door Assembly | |
| 39-2013-A | Halogen Lamp Extra Life | |
| 94-3043 | Light Probe Mikron | |
| 15-161439-00 | Quartz Isolation Plate | |
| 27-274789-00 | PEP Computer | |
| 94-3076/clean | Sapphire Tube clean |
PEP 3510 – PEP 3510+
| Part Number | Description | |
| 06-0091 | Quartz Plasma Chamber | |
| 06-2545 | Quartz Spool | |
| 93-2657 | Lamp HG Ozone | |
| 22-0324 | AP Tech Valve | |
| 06-2704 | Quartz GDP | |
| 06-2679 | Quartz Spool (Short) | |
| 73336-01 | Lamp Cool Station | |
| 73248-01 | Valve Solenoid | |
| 94-2767 | Network Hub | |
| 73325-02 | Halogen Lamp | |
| 73797-06 | Magentron (3510) | |
| 27-274789-00 | PEP Computer | |
| 60-2043 | Magnetron (3510+) |