We can supply most spare parts for the GaSonics tool set; with many being OEM parts.
Please contact us with your spare part requirements to see if we can help reduce your expenditure on spares.
We can supply most spare parts for the GaSonics tool set; with many being OEM parts.
Please contact us with your spare part requirements to see if we can help reduce your expenditure on spares.
Try our Part Search page to find the item you’re looking for
PART SEARCHClick on the system type for spares listings:
pep-spares (3510,3010,Iridia etc)
GaSonics, GaSonics OEM parts, GaSonics obsolete parts, GaSonics repair, GaSonics refurbishment, GaSonics training, 94-3108 PEP Yaskawa GaSonics teach pendant
GaSonics plug & play screen kit, GaSonics L3510, GaSonics PEP 3510, GaSonics CE marking, GaSonics audits, GaSonics installation, GaSonics relocation, PEP IRIDIA, PEP 3010, A3010, A1000, A2000LL, AE2000LL, AE2001, VHP, Aura, GAE UK & Europe, z-bot robot, Hine robot, Hine HAtm-5.0 robot, Hine HAtm-5.0 robot on refurbished L3510; direct replacement for Z-bot I & II
94-1105 End Effector, bespoke end effectors, process specific end effectors, 94-3110 Z-bot II z-axis home flag pcb, 15158-01 gasonics membrane keypads, L3510/A3010, L3510/PEP chamber pins, 94-1105 End Effector, 94-1127 X-Axis Motor, 94-1127 Z-Axis Motor (different companies call them X or Z), 94-1128 Theta Axis Motor, 73797-06 Magnetron, z-bot vac board repair
MW generator repair, lamp controller repair, GaSonics RF generator repairs, L3510 A3010 I/O board repairs, GaSonics robot refurbishment program, PEP mini-controller repairs