Listed below are just a small selection of the parts we are able to offer for the VHP series tools.
If you do not see the particular part that you require, or if you require further information please contact us at gasonics.spares@eupt.co.uk
| Part Number | Description | |
| 04-0032 | Heater Plug | |
| 04-0030 | Heater Main | |
| 93-0086 | Shell Fill Valve | |
| 93-0087 | Shell Vent Valve | |
| 49-0005 | DI Pump | |
| 06-0108 | End Cap Quartz | |
| 06-0109 | Tube, Process Quartz | |
| 06-2606 | Boat 81 Wafer 8″ Quartz | |
| 06-0111 | Boat 61 Wafer 8″ Quartz | |
| 21-2381 | Cylinder, Pneumatic | |
| 21-0026 | Shock Absorber | |
| 68-0006 | Display Module |